| No. |
Film type |
Film thickness[nm] |
Film thickness allowance |
Standard delivery time |
| 1 |
Thermal oxide film |
100 |
±10% |
2.5 weeks |
| 2 |
LP-SiN |
250 |
±10% |
4 weeks |
| 3 |
P-SiN |
500 |
±10% |
4 weeks |
| 4 |
Resist (i-line positive) |
3000 |
±10% |
3 weeks |
| 5 |
P-TEOS |
600 |
±10% |
1.5 months |
| 6 |
Thermal oxide film + Al-Cu |
Thermal oxide film 500 / Al-Cu 1000 |
±10% |
1.5 months |
| 7 |
Thermal oxide film +Al-Si-Cu |
Thermal oxide film 500 / Al-Si-Cu 1000 |
±10% |
1.5 months |
| 8 |
Pure-Al |
100 |
±10% |
1 month |
| 9 |
Thermal oxide film +Ti+Cu |
Thermal oxide film 100 / Ti 50 / Cu 1000 |
±10% |
1.5 months |
| 10 |
Thermal oxide film +Poly-Si |
Thermal oxide film 100 / Poly-Si 200 |
±10% |
2 months |
| 11 |
Thermal oxide film +Ti+W |
Thermal oxide film 100 / Ti 25 / W 65 |
±10% |
Please inquire |
| 12 |
Cu re-plating |
Up to 20000 |
±10% |
2 weeks |
